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[Laser Institute of America ICALEO® 2014: 33rd International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing - San Diego, California, USA (October 19â23, 2014)] International Congress on Applications of Lasers & Electro-Optics - Residual stress analysis in Si-based multilayer structure by micro-Raman spectroscopy
Qiu, Wei, Zhao, Yu-Cheng, Cheng, Cui-Li, Kang, Yi-Lan, Li, Qiu, Lu, Yong-FengYear:
2014
DOI:
10.2351/1.5063151
File:
PDF, 321 KB
2014