[IEEE 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) - Penang, Malaysia (2020.4.6-2020.4.21)] 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) - Back Gate Tunable Thin Film $\alpha$ – Si Nanowire BioFET for pH Detection By Compatible CMOS Fabrication Process

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