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[IEEE 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Hiroshima, Japan (2020.3.23-2020.3.26)] 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Fabrication Technology of Quartz Glass Resonator Using Sacrificial Metal Support Structure
Khan, Muhammad Jehanzeb, Tsukamoto, Takashiro, Tanaka, ShujiYear:
2020
DOI:
10.1109/INERTIAL48129.2020.9090012
File:
PDF, 2.23 MB
2020