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XPS chemical state analysis of sputter depth profiling measurements for annealed TiAlâSiO 2 and TiAlâW layer stacks
Oswald, Steffen, Lattner, Eric, Seifert, MariettaJournal:
Surface and Interface Analysis
DOI:
10.1002/sia.6820
Date:
June, 2020
File:
PDF, 807 KB
2020