Femtosecond laser microfabrication of micro-channels on (1â¯0â¯0) silicon surfaces
Al-Gawati, Mahmoud A., Alhazaa, Abdulaziz N., Alodhayb, Abdullah N., Almutairi, Zeyad A., Albrithen, Hamad A.Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2020.05.395
Date:
June, 2020
File:
PDF, 2.27 MB
2020