A Method for Improving Out-of-plane Robustness of an Area-changed Capacitive Displacement Transducer Used in a Micro-accelerometer
Yan, Shitao, Liu, Huafeng, Xu, Qiangwei, Liu, Dandan, Zhang, Mengqi, Wu, Wenjie, Tu, LiangchengJournal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.112156
Date:
June, 2020
File:
PDF, 2.00 MB
2020