Wet-chemical Etching of FIB Lift-out TEM Lamellae for...

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Wet-chemical Etching of FIB Lift-out TEM Lamellae for Damage-free Analysis of 3-D Nanostructures

Turner, Emily M., Sapkota, Keshab R., Hatem, Christopher, Lu, Ping, Wang, George T., Jones, Kevin S.
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Journal:
Ultramicroscopy
DOI:
10.1016/j.ultramic.2020.113049
Date:
June, 2020
File:
PDF, 1.16 MB
2020
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