Diffusion Mechanism in Aluminum–Silicon Structures...

Technical Physics 2020 / 1 Vol. 65; Iss. 1

Diffusion Mechanism in Aluminum–Silicon Structures Surface-Irradiated by Off-Electrode Plasma of a High-Voltage Gas Discharge

Kolpakov, V. A., Krichevskii, S. V.
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Volume:
65
Journal:
Technical Physics
DOI:
10.1134/S1063784220010132
Date:
January, 2020
File:
PDF, 481 KB
2020
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