Synthesis of nanocrystalline silicon thin films using the increase of the deposition pressure in the hot-wire chemical vapour deposition technique
Halindintwali, S., Knoesen, D., Swanepoel, R., Julies, B.A., Arendse, C., Muller, T., Theron, C.C., Gordijn, A., Bronsveld, P.C.P., Rath, J.K., Schropp, R.E.I.Volume:
105
Journal:
South African Journal of Science
DOI:
10.4102/sajs.v105i7/8.79
Date:
January, 2010
File:
PDF, 412 KB
2010