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A novel compliant mechanism based system to calibrate spring constant of AFM cantilevers
Tian, Yanling, Zhou, Chongkai, Wang, Fujun, Lu, Kangkang, Zhang, DaweiVolume:
309
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.112027
Date:
July, 2020
File:
PDF, 3.51 MB
2020