Progress in low energy high intensity ion implantation...

Surface and Coatings Technology 2020 / 04 Vol. 388

Progress in low energy high intensity ion implantation method development

Ryabchikov, A.I.
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Volume:
388
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2020.125561
Date:
April, 2020
File:
PDF, 2.51 MB
2020
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