Self-detached membranes with well-defined pore size, shape...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 07 Vol. 38; Iss. 4

Self-detached membranes with well-defined pore size, shape and distribution fabricated by underexposure photolithography

Li, Tingjie, Jia, Peipei, Leung, Kar Man, Guo, Qiuquan, Yang, Jun
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Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000203
Date:
July, 2020
File:
PDF, 3.67 MB
2020
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