Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2020 / 07 Vol. 38; Iss. 4
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One-dimensional simulation of CouetteâPoiseuille flow with variable cross section for the full range of gas rarefaction
Jünemann, Timo, Brümmer, AndreasVolume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000207
Date:
July, 2020
File:
PDF, 1.70 MB
2020