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Effect of catch cup geometry on 3D boundary layer flow over the wafer surface in a spin coating
Mizue Munekata, Seiichi Kimura, Hiroaki Kurishima, Jinsuke Tanaka, Sohei Yamamoto, Hiroyuki Yoshikawa, Kazuyoshi Matsuzaki, Hideki OhbaVolume:
17
Language:
english
Pages:
5
DOI:
10.1007/s11630-008-0056-3
Date:
March, 2008
File:
PDF, 185 KB
english, 2008