Effect of catch cup geometry on 3D boundary layer flow over...

Journal of Thermal Science 2008 / 03 Vol. 17; Iss. 1

Effect of catch cup geometry on 3D boundary layer flow over the wafer surface in a spin coating

Mizue Munekata, Seiichi Kimura, Hiroaki Kurishima, Jinsuke Tanaka, Sohei Yamamoto, Hiroyuki Yoshikawa, Kazuyoshi Matsuzaki, Hideki Ohba
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Volume:
17
Language:
english
Pages:
5
DOI:
10.1007/s11630-008-0056-3
Date:
March, 2008
File:
PDF, 185 KB
english, 2008
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