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Formation of ohmic Ni electrodes on femtosecond laser-modified 4HâSiC surface
Okada, Tatsuya, Fuchikami, Yuki, Mimura, Kazuki, Ueki, Tomoyuki, Hisazawa, Hiromu, Tomita, TakuroVolume:
126
Journal:
Applied Physics A
DOI:
10.1007/s00339-020-03733-w
Date:
July, 2020
File:
PDF, 1.72 MB
2020