Impacts of oxygen radical ambient on structural and optical properties of (AlGa) 2 O 3 films deposited by pulsed laser deposition
Zhang, Fabi, Hu, Congyu, Arita, Makoto, Saito, Katsuhiko, Tanaka, Tooru, Guo, QixinVolume:
10
Journal:
AIP Advances
DOI:
10.1063/1.5140822
Date:
June, 2020
File:
PDF, 5.08 MB
2020