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Influence of metastable atoms in low pressure magnetized radio-frequency argon discharges
Zheng, Bocong, Fu, Yangyang, Wen, De-qi, Wang, Keliang, Schuelke, Thomas, Fan, Qi HuaJournal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/ab9f68
Date:
June, 2020
File:
PDF, 4.33 MB
2020