Vapor phase infiltration of aluminum oxide into benzocyclobutene-based polymer dielectrics to increase adhesion strength to thin film metal interconnects
Dwarakanath, Shreya, Raj, Pulugurtha Markondeya, Kondekar, Neha, Losego, Mark D., Tummala, RaoVolume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5141475
Date:
May, 2020
File:
PDF, 3.45 MB
2020