Assessing atomically thin delta-doping of silicon using mid-infrared ellipsometry
Katzenmeyer, Aaron M., Luk, Ting S., Bussmann, Ezra, Young, Steve, Anderson, Evan M., Marshall, Michael T., Ohlhausen, James A., Kotula, Paul, Lu, Ping, Campbell, DeAnna M., Lu, Tzu-Ming, Liu, Peter QJournal:
Journal of Materials Research
DOI:
10.1557/jmr.2020.155
Date:
June, 2020
File:
PDF, 731 KB
2020