A Novel Oxygen-Based Digital Etching Technique for...

Chinese Physics Letters 2020 / 06 Vol. 37; Iss. 6

A Novel Oxygen-Based Digital Etching Technique for p-GaN/AlGaN Structures without Etch-Stop Layers

Jiang, Yang, Wan, Ze-Yu, Zhou, Guang-Nan, Fan, Meng-Ya, Yang, Gai-Ying, Sokolovskij, R., Xia, Guang-Rui, Wang, Qing, Yu, Hong-Yu
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Volume:
37
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/37/6/068503
Date:
June, 2020
File:
PDF, 1.68 MB
2020
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