[IEEE 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) - Edinburgh, United Kingdom (2020.5.4-2020.5.18)] 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) - Extraction of Ultra-Low Contact Resistivity by End-Resistance Method
Tsui, Bing-Yue, Lee, Ya-Hsin, Wu, Dong-Ying, Lee, Yao-Jen, Li, Mei-YiYear:
2020
DOI:
10.1109/ICMTS48187.2020.9107910
File:
PDF, 712 KB
2020