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Molecular Layer Deposition of Hybrid Siloxane Thin Films By Ring Opening of Cyclic Trisiloxane (V3D3) and Azasilane
Ashurbekova, Kristina, Ashurbekova, Karina, Saric, Iva, Modin, Evgeny, Petravic, Mladen, Abdulagatov, Ilmutdin, Abdulagatov, Aziz, Knez, MatoYear:
2020
Journal:
Chemical Communications
DOI:
10.1039/D0CC04195E
File:
PDF, 1.30 MB
2020