Simulation analysis of grid-type PVD thin film sensor based on COMSOL
Yujian, Song, Ronghong, Cui, Yuting, He, Tao, Chen, Xianghong, FanVolume:
1550
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1550/3/032023
Date:
May, 2020
File:
PDF, 789 KB
2020