Kinetic analysis of NaF vaporization in SiF4-Ar mixture

Metallurgical and Materials Transactions B 2001 / 06 Vol. 32; Iss. 3

Kinetic analysis of NaF vaporization in SiF4-Ar mixture

Yoshiaki Kashiwaya, Alan W. Cramb
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Volume:
32
Language:
english
Pages:
7
DOI:
10.1007/s11663-001-0024-8
Date:
June, 2001
File:
PDF, 383 KB
english, 2001
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