Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation
Milov, I., Zhakhovsky, V., Ilnitsky, D., Migdal, K., Khokhlov, V., Petrov, Yu., Inogamov, N., Lipp, V., Medvedev, N., Ziaja, B., Medvedev, V., Makhotkin, I.A., Louis, E., Bijkerk, F.Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.146952
Date:
June, 2020
File:
PDF, 7.28 MB
2020