Design and stiffness modeling of a four-degree-of-freedom...

Review of Scientific Instruments 2020 / 06 Vol. 91; Iss. 6

Design and stiffness modeling of a four-degree-of-freedom nanopositioning stage based on six-branched-chain compliant parallel mechanisms

Wang, Ruizhou, Wu, Heng, Wang, Han, Zhang, Xianmin
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Volume:
91
Journal:
Review of Scientific Instruments
DOI:
10.1063/5.0008905
Date:
June, 2020
File:
PDF, 5.52 MB
2020
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