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TEM investigation of silicon carbide wafers with reduced micropipe density
S. E. Saddow, T. E. Schattner, M. Shamsuzzoha, S. V. Rendakova, V. A. DmitrievVolume:
29
Year:
2000
Language:
english
Pages:
4
DOI:
10.1007/s11664-000-0078-4
File:
PDF, 183 KB
english, 2000