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Al, B, and Ga ion-implantation doping of SiC
Evan M. Handy, Mulpuri V. Rao, O. W. Holland, P. H. Chi, K. A. Jones, M. A. Derenge, R. D. Vispute, T. VenkatesanVolume:
29
Year:
2000
Language:
english
Pages:
6
DOI:
10.1007/s11664-000-0135-z
File:
PDF, 198 KB
english, 2000