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The removal of deformed submicron particles from silicon wafers by spin rinse and megasonics
Fan Zhang, Ahmed A. Busnaina, Michael A. Fury, Shi-Qing WangVolume:
29
Year:
2000
Language:
english
Pages:
6
DOI:
10.1007/s11664-000-0142-0
File:
PDF, 207 KB
english, 2000