Transfer of n-type GaSb onto GaAs substrate by hydrogen...

Journal of Electronic Materials 2000 Vol. 29; Iss. 7

Transfer of n-type GaSb onto GaAs substrate by hydrogen implantation and wafer bonding

Y. Zheng, P. D. Moran, Z. F. Guan, S. S. Lau, D. M. Hansen, T. F. Kuech, T. E. Haynes, T. Hoechbauer, M. Nastasi
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Volume:
29
Year:
2000
Language:
english
Pages:
5
DOI:
10.1007/s11664-000-0181-6
File:
PDF, 1.67 MB
english, 2000
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