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Electrical properties of Ru and RuO2gate electrodes for Si-PMOSFET with ZrO2and Zr-silicate dielectrics
Huicai Zhong, Greg Heuss, You-Seok Suh, Veena Misra, Shin-Nam HongVolume:
30
Year:
2001
Language:
english
Pages:
6
DOI:
10.1007/s11664-001-0164-2
File:
PDF, 307 KB
english, 2001