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Anomalous scaling effect of tungsten/titanium nitride/titanium to silicon electrical contact resistance for subquarter micron microelectronic devices
Jun-Ho Choy, Young-Soo Kim, Tae-Keun Hwang, Yeong-Cheol Kim, Duk-Hee Lee, Jin-Tae Choi, Kwon-Shik Park, Sang Beom HanVolume:
30
Year:
2001
Language:
english
Pages:
7
DOI:
10.1007/s11664-001-0180-2
File:
PDF, 502 KB
english, 2001