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Alternative boron precursors for BGaAs epitaxy
J. F. Geisz, D. J. Friedman, Sarah Kurtz, R. C. Reedy, G. BarberVolume:
30
Year:
2001
Language:
english
Pages:
5
DOI:
10.1007/s11664-001-0188-7
File:
PDF, 344 KB
english, 2001