Simulation of microstructural evolution induced by scanned...

Journal of Electronic Materials 2001 Vol. 30; Iss. 1

Simulation of microstructural evolution induced by scanned laser annealing of metallic interconnects

C. S. Hau-Riege, S. P. Hau-Riege, C. V. Thompson
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Volume:
30
Year:
2001
Language:
english
Pages:
6
DOI:
10.1007/s11664-001-0208-7
File:
PDF, 267 KB
english, 2001
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