Effect of hydrogen etching and subsequent sacrificial...

Journal of Electronic Materials 2002 Vol. 31; Iss. 5

Effect of hydrogen etching and subsequent sacrificial thermal oxidation on morphology and composition of 4H-SiC surfaces

J. T. Wolan, B. A. Grayson, J. Kohlscheen, Y. Emirov, R. Schlaf, W. Swartz, S. E. Saddow
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Volume:
31
Year:
2002
Language:
english
Pages:
4
DOI:
10.1007/s11664-002-0087-6
File:
PDF, 234 KB
english, 2002
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