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Analysis of copper grains in damascene trenches after rapid thermal processing or furnace anneals
Qing-Tang Jiang, Matt Nowell, Brendan Foran, Aaron Frank, R. H. Havemann, Vijay Parihar, R. A. Augur, J. D. LuttmerVolume:
31
Year:
2002
Language:
english
Pages:
6
DOI:
10.1007/s11664-002-0166-8
File:
PDF, 1.14 MB
english, 2002