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Effect of photoresist-feature geometry on electron-cyclotron resonance plasma-etch reticulation of HgCdTe diodes
J. D. Benson, A. J. Stoltz, A. W. Kaleczyc, M. Martinka, L. A. Almeida, P. R. Boyd, J. H. DinanVolume:
31
Year:
2002
Language:
english
Pages:
5
DOI:
10.1007/s11664-002-0244-y
File:
PDF, 459 KB
english, 2002