Fabrication of ultra-thin strained silicon on insulator

Journal of Electronic Materials 2003 Vol. 32; Iss. 9

Fabrication of ultra-thin strained silicon on insulator

T. S. Drake, C. Ní Chléirigh, M. L. Lee, A. J. Pitera, E. A. Fitzgerald, D. A. Antoniadis, D. H. Anjum, J. Li, R. Hull, N. Klymko, J. L. Hoyt
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Volume:
32
Year:
2003
Language:
english
Pages:
4
DOI:
10.1007/s11664-003-0232-x
File:
PDF, 777 KB
english, 2003
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