Impact of highâtemperatureâannealing on boron containing AlN layers grown by MOVPE
Rettig, Oliver, Scholz, Ferdinand, Li, Yueliang, Biskupek, Johannes, Kaiser, Ute, Hagedorn, Sylvia, Weyers, Markus, Müller, Raphael, Thonke, KlausJournal:
physica status solidi (a)
DOI:
10.1002/pssa.202000251
Date:
June, 2020
File:
PDF, 437 KB
2020