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Impact of high‐temperature‐annealing on boron...

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  • Impact of high‐temperature‐annealing on boron...

Impact of high‐temperature‐annealing on boron containing AlN layers grown by MOVPE

Rettig, Oliver, Scholz, Ferdinand, Li, Yueliang, Biskupek, Johannes, Kaiser, Ute, Hagedorn, Sylvia, Weyers, Markus, Müller, Raphael, Thonke, Klaus
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Journal:
physica status solidi (a)
DOI:
10.1002/pssa.202000251
Date:
June, 2020
File:
PDF, 437 KB
2020
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