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Porous organosilicates low-dielectric films for high-frequency devices
André Knoesen, Ge Song, Willi Volksen, Elbert Huang, Teddie Magbitang, Linda Sundberg, James L. Hedrick, Craig J. Hawker, Robert D. MillerVolume:
33
Year:
2004
Language:
english
Pages:
6
DOI:
10.1007/s11664-004-0283-7
File:
PDF, 285 KB
english, 2004