Preparation of ultrasmooth and defect-free 4H-SiC(0001)...

Preparation of ultrasmooth and defect-free 4H-SiC(0001) surfaces by elastic emission machining

Akihisa Kubota, Hidekazu Mimura, Kouji Inagaki, Kenta Arima, Yuzo Mori, Kazuto Yamauchi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
34
Year:
2005
Language:
english
Pages:
5
DOI:
10.1007/s11664-005-0124-3
File:
PDF, 362 KB
english, 2005
Conversion to is in progress
Conversion to is failed