Preparation of ultrasmooth and defect-free 4H-SiC(0001) surfaces by elastic emission machining
Akihisa Kubota, Hidekazu Mimura, Kouji Inagaki, Kenta Arima, Yuzo Mori, Kazuto YamauchiVolume:
34
Year:
2005
Language:
english
Pages:
5
DOI:
10.1007/s11664-005-0124-3
File:
PDF, 362 KB
english, 2005