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Influence of tungsten sputtering target density on physical vapor deposition thin film properties
Chi-Fung Lo, Peter McDonald, Darryl Draper, Paul GilmanVolume:
34
Year:
2005
Language:
english
Pages:
6
DOI:
10.1007/s11664-005-0152-z
File:
PDF, 438 KB
english, 2005