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Radiation hardness improvement of separation-by-implantation-of-oxygen/silicon-on-insulator material by nitrogen ion implantation
Enxia Zhang, Jiayin Sun, Jing Chen, Zhengxuan Zhang, Xi Wang, Ning Li, Guoqiang Zhang, Zhongli LiuVolume:
34
Year:
2005
Language:
english
Pages:
1
DOI:
10.1007/s11664-005-0206-2
File:
PDF, 83 KB
english, 2005