Surface modification of silicon by laser surface treatment:...

Journal of Electronic Materials 2005 Vol. 34; Iss. 2

Surface modification of silicon by laser surface treatment: Improvement of adhesion and copper deposition

Cheon Lee, Dong-Yong Kim, Jae-Hong Kim, Kyoung-Cheol Lee, Chang-Su Hui
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
34
Year:
2005
Language:
english
Pages:
5
DOI:
10.1007/s11664-005-0223-1
File:
PDF, 591 KB
english, 2005
Conversion to is in progress
Conversion to is failed