Simultaneous formation of p- and n-type ohmic contacts to...

Journal of Electronic Materials 2005 Vol. 34; Iss. 10

Simultaneous formation of p- and n-type ohmic contacts to 4H-SiC using the ternary Ni/Ti/Al system

S. Tsukimoto, T. Sakai, T. Onishi, Kazuhiro Ito, Masanori Murakami
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Volume:
34
Year:
2005
Language:
english
Pages:
3
DOI:
10.1007/s11664-005-0255-6
File:
PDF, 61 KB
english, 2005
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