Investigation of the Surface Removal Process of Silicon...

Journal of Electronic Materials 2007 / 01 Vol. 36; Iss. 1

Investigation of the Surface Removal Process of Silicon Carbide in Elastic Emission Machining

Akihisa Kubota, Yohsuke Shinbayashi, Hidekazu Mimura, Yasuhisa Sano, Kouji Inagaki, Yuzo Mori, Kazuto Yamauchi
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Volume:
36
Language:
english
Pages:
6
DOI:
10.1007/s11664-006-0006-3
Date:
January, 2007
File:
PDF, 415 KB
english, 2007
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