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Comparison of Solid-State Microwave Annealing with Conventional Furnace Annealing of Ion-Implanted SiC
SIDDARTH G. SUNDARESAN, MULPURI V. RAO, YONGLAI TIAN, JOHN A. SCHREIFELS, MARK C. WOOD, KENNETH A. JONES, ALBERT V. DAVYDOVVolume:
36
Language:
english
Pages:
8
DOI:
10.1007/s11664-006-0032-1
Date:
April, 2007
File:
PDF, 367 KB
english, 2007