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Investigations on Electrode-Less Wet Etching of GaN Using Continuous Ultraviolet Illumination
R. T. Green, W. S. Tan, P. A. Houston, T. Wang, P. J. ParbrookVolume:
36
Language:
english
Pages:
6
DOI:
10.1007/s11664-006-0070-8
Date:
April, 2007
File:
PDF, 281 KB
english, 2007