Chemical Vapor Deposition of Silicon Carbide Epitaxial...

Journal of Electronic Materials 2007 / 04 Vol. 36; Iss. 4

Chemical Vapor Deposition of Silicon Carbide Epitaxial Films and Their Defect Characterization

Govindhan Dhanaraj, Yi Chen, Hui Chen, Dang Cai, Hui Zhang, Michael Dudley
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Volume:
36
Language:
english
Pages:
8
DOI:
10.1007/s11664-006-0084-2
Date:
April, 2007
File:
PDF, 513 KB
english, 2007
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