Variable gaseous ion beams from plasmas driven by electromagnetic waves for nano-micro structuring: a tutorial and an overview of recent works and future prospects
Maurya, Sanjeev Kumar, Bhattacharjee, SudeepJournal:
Plasma Research Express
DOI:
10.1088/2516-1067/aba07c
Date:
June, 2020
File:
PDF, 2.71 MB
2020